Mechanical Design of RF MEMS Capacitive Switches
نویسنده
چکیده
This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a frequency of 2 GHz. At the time of writing, the proposed devices are being processed. Keywords RF MEMS; capacitive micromachined switch; electrostatic actuators; micromechanical devices
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